Application

13928216 · METHODS OF FORMING TENSILE TUNGSTEN FILMS AND COMPRESSIVE TUNGSTEN FILMS

Filed 2013-06-26 · Granted · Patent 9034760 (2015-05-19) The official file ↗The patent and its PDF ↗ · Art unit 2822 · Examiner Bac H Au Typical · CPC H10P 14/432 · Novellus Systems, Inc. · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

14.6 mo

to disposition 22.7 mo

Statutes raised

103

1 actions read

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