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13989004 · TEMPLATE LAYERS FOR HETEROEPITAXIAL DEPOSITION OF III-NITRIDE SEMICONDUCTOR MATERIALS USING HVPE PROCESSES

Filed 2013-11-11 · Granted · Patent 9076666 (2015-07-07) The official file ↗The patent and its PDF ↗ · Art unit 2893 · Examiner Ngan V Ngo Easy · CPC H10D 62/118 · SOITEC · TRASKBRITT, P.C.

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
9.9 mo
to disposition 19.8 mo
Statutes raised
103
1 actions read
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