Application

14055281 · ABATEMENT OF REACTION GASES FROM GALLIUM NITRIDE DEPOSITION

Filed 2013-10-16 · Granted · Patent 9038565 (2015-05-26) The official file ↗The patent and its PDF ↗ · Art unit 1732 · Examiner Bijay S Saha Hard · CPC C30B 25/14 · Soitec · TRASKBRITT, P.C.

Office actions

first was Non-final rejection

RCEs

appealed

To first action

1.4 mo

to disposition 19.3 mo

Statutes raised

103

2 actions read

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