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14082448 · CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT

Filed 2013-11-18 · Granted · Patent 8945939 (2015-02-03) The official file ↗The patent and its PDF ↗ · Art unit 1772 · Examiner Dennis Michael White Easy · CPC G01N 21/272 · Nalco Company · NALCO COMPANY

Office actions
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first was Notice of allowance
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no appeal
To first action
4.0 mo
to disposition 14.5 mo
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