Application

14088933 · PEAK-BASED ENDPOINTING FOR CHEMICAL MECHANICAL POLISHING

Filed 2013-11-25 · Granted · Patent 9564377 (2017-02-07) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Sylvia Macarthur Typical · CPC H10P 74/238 · Applied Materials, Inc. · FISH & RICHARDSON P.C. (APPLIED MATERIALS)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.1 mo

to disposition 38.4 mo

Statutes raised

102 103 112

2 actions read

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