PATLY.AIApplication
14097160 · LOW TEMPATURE TUNGSTEN FILM DEPOSITION FOR SMALL CRITICAL DIMENSION CONTACTS AND INTERCONNECTS
Filed 2013-12-04 · Granted · Patent 9236297 (2016-01-12) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Caleb E Henry Typical · CPC H10W 20/20 · Novellus Systems, Inc. · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL
Office actions
2
first was Restriction requirement
RCEs
0
no appeal
To first action
7.3 mo
to disposition 25.3 mo
Statutes raised
102 103
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