Application
14191547 · APPARATUS AND METHOD FOR HIGH-SPEED PHASE SHIFTING FOR INTERFEROMETRIC MEASUREMENT SYSTEMS
Filed 2014-02-27 · Granted · Patent 8848271 (2014-09-30) The official file ↗The patent and its PDF ↗ · Art unit 2872 · Examiner Evelyn A Lester Easy · CPC G02B 26/06 · Dimensional Photonics International, Inc. · DIMENSIONAL PHOTONICS, INC.
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