Application

14238781 · Methods of Continuously Wet Etching A Patterned Substrate

Filed 2014-02-13 · Granted · Patent 9301397 (2016-03-29) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Jiong-Ping Lu Typical · CPC C23F 1/02 · 3M INNOVATIVE PROPERTIES COMPANY · 3M INNOVATIVE PROPERTIES COMPANY

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

16.8 mo

to disposition 25.5 mo

Statutes raised

0 actions read

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