Application

14256419 · Developer Free Positive Tone Lithography by Thermal Direct Write

Filed 2014-04-18 · Granted · Patent 10074544 (2018-09-11) The official file ↗The patent and its PDF ↗ · Art unit 1746 · Examiner Christopher T Schatz Hard · CPC H01L 21/308 · Massachusetts Institute of Technology · NUTTER MCCLENNEN & FISH LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

29.5 mo

to disposition 52.8 mo

Statutes raised

103 112

3 actions read

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