Application

14295558 · WAFER-BASED LIGHT SOURCE PARAMETER CONTROL

Filed 2014-06-04 · Granted · Patent 9715180 (2017-07-25) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Deoram Persaud Typical · CPC G03F 7/70358 · Cymer, LLC · ASML CIP (San Diego) / DMIPG

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.5 mo

to disposition 37.7 mo

Statutes raised

102 103

2 actions read

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