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14313751 · METHOD OF DEPOSITING COPPER USING PHYSICAL VAPOR DEPOSITION

Filed 2014-06-24 · Granted · Patent 9728414 (2017-08-08) The official file ↗The patent and its PDF ↗ · Art unit 2898 · Examiner Mary A Wilczewski Typical · CPC H10P 14/43 · SPANSION LLC · SPANSION LLC C/O Cypress Semiconductor

Office actions
5
first was Non-final rejection
RCEs
4
no appeal
To first action
5.3 mo
to disposition 37.5 mo
Statutes raised
102 103 112 DP
5 actions read
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