Application

14358618 · METHOD FOR EVALUATING SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL

Filed 2014-05-15 · Granted · Patent 9111883 (2015-08-18) The official file ↗The patent and its PDF ↗ · Art unit 2895 · Examiner Chi-Hua Yang · CPC H01L 21/3225 · SHIN-ETSU HANDOTAI CO., LTD. · OLIFF PLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.0 mo

to disposition 15.1 mo

Statutes raised

103

1 actions read

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