PATLY.AIApplication
14368386 · HEAT TRANSFER CONTROL IN PECVD SYSTEMS
Filed 2014-06-24 · Abandoned The official file ↗ · Art unit 1716 · Examiner Karla A Moore Hard · CPC C23C 16/4411 · TEL Solar AG · Tokyo Electron U.S. Holdings, Inc.
Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
33.2 mo
to disposition 40.2 mo
Statutes raised
102 103
1 actions read