Application

14389944 · DEVICE FOR DEPOSITING A LAYER ON A SEMICONDUCTOR WAFER BY MEANS OF VAPOUR DEPOSITION

Filed 2014-10-01 · Granted · Patent 9153472 (2015-10-06) The official file ↗The patent and its PDF ↗ · Art unit 2813 · Examiner Maliheh Malek Typical · CPC H10P 72/7624 · SILTRONIC AG · Brooks Kushman P.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

3.8 mo

to disposition 12.2 mo

Statutes raised

103

1 actions read

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