Application

14413394 · LITHOGRAPHIC CLUSTER SYSTEM, METHOD FOR CALIBRATING A POSITIONING DEVICE OF A LITHOGRAPHIC APPARATUS

Filed 2015-01-07 · Granted · Patent 9395633 (2016-07-19) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70633 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

15.2 mo

to disposition 18.4 mo

Statutes raised

0 actions read

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