Application

14437294 · Patterning Device Manipulating System and Lithographic Apparatuses

Filed 2015-04-21 · Granted · Patent 9910368 (2018-03-06) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Michelle M Iacoletti Typical · CPC G03F 7/70783 · ASML Holding N.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

15.9 mo

to disposition 34.5 mo

Statutes raised

102 103 112

2 actions read

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