PATLY.AIApplication
14442546 · SEMICONDUCTOR STRUCTURE AND RECESS FORMATION ETCH TECHNIQUE
Filed 2015-05-13 · Granted · Patent 9570600 (2017-02-14) The official file ↗The patent and its PDF ↗ · Art unit 2823 · Examiner Nicholas J Tobergte Easy · CPC H10D 30/4755 · Massachusetts Institute of Technology · WOLF GREENFIELD & SACKS, P.C.
Office actions
1
first was Restriction requirement
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0
no appeal
To first action
10.4 mo
to disposition 21.1 mo
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