Application

14444791 · LOW CONTAMINATION SCANNER FOR GCIB SYSTEM

Filed 2014-07-28 · Granted · Patent 9029808 (2015-05-12) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Phillip A Johnston Typical · CPC H01J 37/20 · TEL EPION Inc. · WOOD, HERRON & EVANS, LLP (TOKYO ELECTRON)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

7.0 mo

to disposition 9.5 mo

Statutes raised

0 actions read

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