Application

14505290 · Method of Forming Metal Oxide Hardmask

Filed 2014-10-02 · Granted · Patent 9171716 (2015-10-27) The official file ↗The patent and its PDF ↗ · Art unit 2816 · Examiner Savitri Mulpuri Typical · CPC H10P 14/6932 · ASM Japan K.K. · Snell & Wilmer (ASM IP Holding B.V.)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

5.3 mo

to disposition 12.8 mo

Statutes raised

1 actions read

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