Application

14579245 · LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AND RELATED METHOD

Filed 2014-12-22 · Abandoned The official file ↗ · Art unit 2882 · Examiner Chia How Michael Liu Hard · CPC G03F 7/70825 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

7.2 mo

to disposition 37.1 mo

Statutes raised

102 103

4 actions read

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