Application

14624118 · LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2015-02-17 · Granted · Patent 9639006 (2017-05-02) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Chia How Michael Liu Hard · CPC G03F 7/70866 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

appealed

To first action

4.7 mo

to disposition 26.4 mo

Statutes raised

102 103

1 actions read

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