Application

14632648 · WAFER ROTATION IN A SEMICONDUCTOR CHAMBER

Filed 2015-02-26 · Granted · Patent 9593419 (2017-03-14) The official file ↗The patent and its PDF ↗ · Art unit 2898 · Examiner Chuong A Luu Typical · CPC H10P 14/6336 · APPLIED MATERIALS, INC. · PATTERSON & SHERIDAN, LLP - - APPLIED MATERIALS

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

10.5 mo

to disposition 24.5 mo

Statutes raised

102 103

1 actions read

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