Application

14633904 · Technique For Processing A Substrate

Filed 2015-02-27 · Abandoned The official file ↗ · Art unit 2817 · Examiner Bradley Smith Typical · CPC H01L 21/265 · Varian Semiconductor Equipment Associates, Inc. · Nields, Lemack & Frame, LLC - Varian

Office actions

first was Non-final rejection

RCEs

appealed

To first action

2.6 mo

to disposition n/a

Statutes raised

102 103 112

3 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.

See plans Sign in