Application

14657234 · A MICRO STAGE FOR PARTICLE BEAM COLUMN USING PIEZO ELEMENTS AS ACTUATOR

Filed 2015-03-13 · Granted · Patent 9837245 (2017-12-05) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/20 · CEBT CO., LTD · John K. Park

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

16.3 mo

to disposition 32.8 mo

Statutes raised

102 103

2 actions read

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