Application

14657772 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2015-03-13 · Granted · Patent 9529277 (2016-12-27) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

appealed

To first action

8.6 mo

to disposition 21.5 mo

Statutes raised

103 DP

2 actions read

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