Application

14662514 · IMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING SAME AND RELATED METHODS

Filed 2015-03-19 · Granted · Patent 9535337 (2017-01-03) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/702 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.5 mo

to disposition 21.6 mo

Statutes raised

102 103

3 actions read

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