Application

14664360 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2015-03-20 · Granted · Patent 9429853 (2016-08-30) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

8.5 mo

to disposition 17.4 mo

Statutes raised

0 actions read

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