Application

14688627 · METHOD AND AN APPARATUS HAVING A COMPRESSIBLE COLLAR FOR THERMALLY TREATING A PHOTOSENSITIVE PRECURSOR

Filed 2015-04-16 · Granted · Patent 9291906 (2016-03-22) The official file ↗The patent and its PDF ↗ · Art unit 2854 · Examiner Joshua D Zimmerman Typical · CPC G03F 7/36 · E I DU PONT DE NEMOURS AND COMPANY · DUPONT SPECIALTY PRODUCTS USA, LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

2.3 mo

to disposition 11.2 mo

Statutes raised

0 actions read

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