Application

14696063 · METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM SYSTEM

Filed 2015-04-24 · Granted · Patent 9540725 (2017-01-10) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner David E Graybill Typical · CPC C23C 14/221 · TEL Epion Inc. · WOOD, HERRON & EVANS, LLP (TOKYO ELECTRON)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.8 mo

to disposition 20.6 mo

Statutes raised

102 103 112

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.