Application

14699185 · EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

Filed 2015-04-29 · Granted · Patent 9411248 (2016-08-09) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mona M Sanei Hard · CPC G03F 7/70341 · NIKON CORPORATION · OLIFF PLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.7 mo

to disposition 15.4 mo

Statutes raised

1 actions read

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