Application

14704384 · LITHOGRAPHIC APPARATUS

Filed 2015-05-05 · Granted · Patent 9465302 (2016-10-11) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

11.5 mo

to disposition 17.2 mo

Statutes raised

0 actions read

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