Application

14722597 · PLANARIZATION PROCESS

Filed 2015-05-27 · Granted · Patent 10068803 (2018-09-04) The official file ↗The patent and its PDF ↗ · Art unit 2828 · Examiner Joshua King Typical · CPC H10D 84/0126 · INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES · Knobbe, Martens, Olson & Bear, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

16.3 mo

to disposition 39.3 mo

Statutes raised

102 103

4 actions read

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