Application

14734783 · APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UNDER THE PROJECTION LENS DURING WAFER EXCHANGE IN AN IMMERSION LITHOGRAPHY MACHINE

Filed 2015-06-09 · Granted · Patent 9946163 (2018-04-17) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Chia How Michael Liu Hard · CPC G03F 7/70341 · NIKON CORPORATION · OLIFF PLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.6 mo

to disposition 34.3 mo

Statutes raised

102 DP

1 actions read

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