Application

14762450 · Gas Flow Optimization in Reticle Stage Environment

Filed 2015-07-21 · Granted · Patent 10031428 (2018-07-24) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70933 · ASML HOLDING N.V. · STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.6 mo

to disposition 36.1 mo

Statutes raised

102 103

3 actions read

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