Application

14788700 · Systems and Methods for Inspection of a Specimen

Filed 2015-06-30 · Granted · Patent 11204330 (2021-12-21) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Mohamed K Amara Hard · CPC G01N 21/00 · KLA-Tencor Technologies Corporation · Entropy Matters LLC

Office actions

first was Restriction requirement

RCEs

appealed

To first action

14.3 mo

to disposition 77.7 mo

Statutes raised

102 103

5 actions read

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