Application

14798775 · COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON-CONTAINING FILMS INCLUDING SILICON CARBONITRIDE AND SILICON OXYCARBONITRIDE FILMS

Filed 2015-07-14 · Granted · Patent 9783558 (2017-10-10) The official file ↗The patent and its PDF ↗ · Art unit 1671 · Examiner Kofi Adzamli Easy · CPC C07F 7/10 · Entegris, Inc. · Entegris, Inc.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

22.7 mo

to disposition 26.9 mo

Statutes raised

0 actions read

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