Application

14804976 · Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ultraviolet Source

Filed 2015-07-21 · Granted · Patent 9516729 (2016-12-06) The official file ↗The patent and its PDF ↗ · Art unit 2884 · Examiner Mark R Gaworecki Easy · CPC H05G 2/0086 · ASML Netherlands B.V. · ASML-SD IP Department

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.0 mo

to disposition 16.6 mo

Statutes raised

103

1 actions read

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