Application

14815265 · GCIB NOZZLE ASSEMBLY

Filed 2015-07-31 · Granted · Patent 9343259 (2016-05-17) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Kiet Tuan Nguyen Easy · CPC H01J 37/08 · TEL Epion Inc. · Tokyo Electron U.S. Holdings, Inc.

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

5.4 mo

to disposition 9.6 mo

Statutes raised

0 actions read

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