Application

14841271 · NITROGEN-CONTAINING COMPOUNDS FOR ETCHING SEMICONDUCTOR STRUCTURES

Filed 2015-08-31 · Granted · Patent 9659788 (2017-05-23) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Duy Vu Nguyen Deo Typical · CPC H10P 50/73 · American Air Liquide, Inc. · American Air Liquide

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.8 mo

to disposition 20.7 mo

Statutes raised

102 103 112

2 actions read

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