Application

14872018 · EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER

Filed 2015-09-30 · Granted · Patent 10074953 (2018-09-11) The official file ↗The patent and its PDF ↗ · Art unit 2828 · Examiner Xinning Niu Typical · CPC H01S 3/0385 · CYMER, LLC · ASML-SD IP Department

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

20.8 mo

to disposition 35.4 mo

Statutes raised

103 112

1 actions read

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