Application

14882241 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER

Filed 2015-10-13 · Granted · Patent 10254663 (2019-04-09) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

27.4 mo

to disposition 41.9 mo

Statutes raised

102 DP

1 actions read

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