Application

14912380 · SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR

Filed 2016-02-16 · Granted · Patent 11062906 (2021-07-13) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Syed I Gheyas Typical · CPC H10P 30/20 · ENTEGRIS, INC. · Entegris, Inc.

Office actions

first was Non-final rejection

RCEs

appealed

To first action

9.0 mo

to disposition 64.9 mo

Statutes raised

102 103

7 actions read

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