Application

14912426 · METHOD AND DEVICE FOR POLISHING SEMICONDUCTOR WAFER

Filed 2016-02-17 · Granted · Patent 10553420 (2020-02-04) The official file ↗The patent and its PDF ↗ · Art unit 2817 · Examiner Bradley Smith Typical · CPC H10P 90/129 · SUMCO TECHXIV CORPORATION · GREENBLUM & BERNSTEIN, P.L.C.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

8.4 mo

to disposition 47.6 mo

Statutes raised

102 103 112

6 actions read

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