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14914015 · THIN CAPPING FOR MEMS DEVICES

Filed 2016-02-24 · Granted · Patent 9718674 (2017-08-01) The official file ↗The patent and its PDF ↗ · Art unit 2818 · Examiner Earl N Taylor Easy · CPC H10W 95/00 · SILEX MICROSYSTEMS AB · NIXON & VANDERHYE, PC

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
8.2 mo
to disposition 17.2 mo
Statutes raised
102 103 112
1 actions read
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