Application

14917424 · METHOD OF ETCHING SEMICONDUCTOR STRUCTURES WITH ETCH GAS

Filed 2016-03-08 · Granted · Patent 9773679 (2017-09-26) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Stephanie P. Duclair Typical · CPC H10P 50/268 · AMERICAN AIR LIQUIDE, INC. · American Air Liquide

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

7.8 mo

to disposition 18.6 mo

Statutes raised

103

1 actions read

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