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Application

14939959 · System and Method for Luminescent Tag Based Wafer Inspection

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Filed 2015-11-12 · Granted · Patent 9970873 (2018-05-15) The official file ↗The patent and its PDF ↗ · Art unit 1797 · Examiner Brian J Sines Easy · CPC G01N 21/643 · KLA-Tencor Corporation · KEVIN MCANDREWS

Office actions
1
first was Restriction requirement
RCEs
0
no appeal
To first action
12.6 mo
to disposition 30.1 mo
Statutes raised
102
1 actions read
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