Application

14955625 · EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2015-12-01 · Granted · Patent 9465303 (2016-10-11) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Mona M Sanei Hard · CPC G03B 27/42 · CANON KABUSHIKI KAISHA · Rossi, Kimms & McDowell LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

6.9 mo

to disposition 10.3 mo

Statutes raised

0 actions read

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