Application

14957273 · Atomic Layer Deposition Head

Filed 2015-12-02 · Granted · Patent 9783888 (2017-10-10) The official file ↗The patent and its PDF ↗ · Art unit 1717 · Examiner Yewebdar T Tadesse Easy · CPC C23C 16/45574 · Ultratech, Inc. · Steven Colby

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

15.1 mo

to disposition 22.3 mo

Statutes raised

102 103 112 DP

2 actions read

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