Application

14957562 · METHOD FOR MEMS STRUCTURE WITH DUAL-LEVEL STRUCTURAL LAYER AND ACOUSTIC PORT

Filed 2015-12-02 · Granted · Patent 9802815 (2017-10-31) The official file ↗The patent and its PDF ↗ · Art unit 2826 · Examiner Herve-Louis Y Assouman Typical · CPC B81C 1/00158 · Invensense, Inc. · IVS

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

8.6 mo

to disposition 23.0 mo

Statutes raised

103 112

2 actions read

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