Application

14965467 · LITHOGRAPHIC APPARATUS

Filed 2015-12-10 · Granted · Patent 9696638 (2017-07-04) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC H10P 76/2041 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

6.6 mo

to disposition 18.8 mo

Statutes raised

102 103

2 actions read

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